IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
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IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany by IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany)

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Published by Institute of Electrical and Electronics Engineers, IEEE Service Center in [New York, N.Y.], Piscataway, NJ .
Written in

Subjects:

  • Actuators -- Congresses.,
  • Detectors -- Congresses.,
  • Electromechanical devices -- Congresses.,
  • Microelectronics -- Congresses.

Book details:

Edition Notes

Other titles1998 IEEE Micro Electro Mechanical Systems, Eleventh Annual International Workshop on Micro Electro Mechanical Systems, 11th Annual International Workshop on Micro Electro Mechanical Systems, Investigation of micro structures, sensors, actuators, machines and systems, Micro Electro Mechanical Systems, MEMS 98
Statementsponsored by the IEEE Robotics and Automation Society ; in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.
ContributionsAmerican Society of Mechanical Engineers. Dynamic Systems and Control Division., Baden-Württemberg (Germany). Wirtschaftsministerium., IEEE Robotics and Automation Society.
Classifications
LC ClassificationsTK153 .M468 1998
The Physical Object
Paginationxxx, 666 p. :
Number of Pages666
ID Numbers
Open LibraryOL21348631M
ISBN 10078034412X, 0780344138, 0780344146

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